MKS SurePower® RF Generators provide reliable solid-state power for thin-film, solar cell processing equipment. Our generators offer the highest delivered power (from 3.5kW to 15.0kW and higher) in a compact chassis with extra headroom for process flexibility, and excellent reliability for improved tool uptime. MKS RF generators, combined with our impedance matching networks and our V/I Probe® impedance analyzers, form complete RF delivery systems for the most demanding thin film applications.
