Ibis Technology eyes new SIMOX-SOI research

Scientists at Ibis Technology Corp. in Danvers, Mass., are looking into reducing leakage in separation by implantation of oxygen/silicon-on-insulator (SIMOX-SOI) wafers. Toward this goal, Ibis specialists are considering thinner buried oxide layers, non-destructive testing of SIMOX-SOI wafers for certain quality parameters, and radiation-hardened testing of specially processed SIMOX-SOI substrates. They are working under several research contracts from the U.S. Air Force, National Aeronautics and Space Administration, and Defense Special Weapons Agency. - J.K.